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Acceptable static charge levels continue to decrease with product feature size
This Standard applies to mass flow controllers for gases used in semiconductor fabrication equipment
本仕様では標準的な
SEMI E125-1022 (technical revision)
E05700 - SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様 StdPbc-0526 techniciansglobal Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199620053 300 mm Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF)
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