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SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
according to current IEC standards
1-1114 (complete rewrite)
4 This Guide does not apply to measurement systems used to control intermediate process steps during silicon wafer manufacturing
Such arrays are useful in locating sites for site flatness characterization
E10800 - SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy StdTier-Tier1 SEMI E148 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography mass spectroscopy
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