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and excludes license
orgで入手可能となる。初版は1999年6月発行。前版は2013年4月発行。
製品，またはレチクル
The glass substrate is in shape of a wafer (round) or a panel (square or rectangular)
SEMI C34-0306 (complete rewrite)
E16900 - SEMI E169 - Guide for Equipment Information System Security StdPbc-0823 and excludes licenseThe purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more
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