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SEMI E35-95 (first published)
SEMI E99 — Carrier ID Read/Write Functional Standard
o substrates in one or more process modules where the recipe execution begins and ends simultaneously for all substrates in the process module
Static-control methods can be incorporated in the factory design to reduce static charge to acceptable levels
3-0600 (Withdrawn 0811) — Specification for Rectangular Polished Monocrystalline Indium Phosphide Wafers
C05200 - SEMI C52 - 特殊ガスの貯蔵寿命に関する仕様 Revision:SEMI C52-0301 (Reapproved 0312) - Superseded SEMI E35-95 (first published)global Gases Technical Committee20001220global Audits and Reviews Subcommittee20011www. semiviews. org www. semi. org20013 , , Referenced SEMI Standards None.
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