E03900 - SEMI E39 - オブジェクトサービス･スタンダード：概念，挙動およびサービス StdPbc-0512 SEMI E83-1106 (technical revision)

Name: E03900 - SEMI E39 - オブジェクトサービス･スタンダード：概念，挙動およびサービス StdPbc-0512 SEMI E83-1106 (technical revision)
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Description

SEMI E83-1106 (technical revision)

SEMI C54-0624 (technical revision)

quantity and characteristics of alignment targets that are placed on each wafer of a pair of wafers

but does not define the internal operation of the equipment

기판(substrate)의 위치

E03900 - SEMI E39 - オブジェクトサービス･スタンダード：概念，挙動およびサービス StdPbc-0512 SEMI E83-1106 (technical revision)OSS. Subordinate Standards (included): SEMI E39. 1 0703 (Reapproved 1109) SECS II Protocol for Object Services Standard (OSS) Referenced SEMI Standards (purchase separately) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II)

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